First get a list of all VMs:
vim-cmd vmsvc/getallvms
Identify the invalid vms:
[root@esxi1:~] vim-cmd vmsvc/getallvms Skipping invalid VM '1605' Skipping invalid VM '1606' Skipping invalid VM '1607' Vmid Name File Guest OS Version Annotation 1097 srv1 [nfs_q4_vmbak] srv1_q4-201704210958/srv1_q4-201704210958.vmx centos64Guest vmx-13 srv1 = Firewall / Router zum Internet 1098 srv3_q4-201704211532 [nfs_q4_vmbak] srv3_q4-201704211532/srv3_q4-201704211532.vmx centos64Guest vmx-13 srv3 = DNS
Then remove the VMs with the invalid id:
vim-cmd vmsvc/unregister 1605